MICRO ELECTRICAL SYSTEMS MEMS DEVICES - DOPED POLYSILICON FILM ANALYSIS - RESONATOR COMPONENTS
Summary
MICRO ELECTRICAL SYSTEMS MEMS DEVICES - DOPED POLYSILICON FILM ANALYSIS - RESONATOR COMPONENTS
NASA Identifier: GRC-C-1999-2348
Tags
nasa
micro electrical systems mems devices doped polysilicon film analysis resonator components
dvids
high resolution
glenn research center
aviation research organization
Date
1999
Location
Source
Defense Visual Information Distribution Service
Link
Copyright info
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